Amtech Systems, Inc. manufactures capital equipment, including silicon wafer handling automation, semiconductor processing equipment and related consumables used in fabricating semiconductor devices.  Semiconductors, or semiconductor chips, are fabricated on silicon wafer substrates, sliced from ingots, and are part of the circuitry, or electronic components, of many products, including computers, telecommunication devices, automotive products, consumer goods and industrial automation and control systems.

AMTECH E-300
Full Batch Elevator


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·  Zero Footprint required
·  Retrofit Kit available for 4”, 5”, 6”, 8” and 12” wafers
·  Using a touch screen controller, operator raises or    
    lowers multiple batch boats to each cantilever level

·  Home position is set per ergonomic specification
·  Mounts directly onto any existing Loadstation with installation time less than eight 
    hours
·  Unit is removable for furnace maintenance or tube changes
·  Operator steps up or down with only an empty pick up fork, then places boats 
    between the E-300 and cantilever manually

AMTECH S-300
Full Batch Robot  


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·  Zero Footprint required
·  Retrofit Kit available for 4”, 5”, 6”, 8” and 12” wafers
·  Works with any existing Furnace and Cantilever Loader
·  Mounts directly on to any existing Loadstation  

·  The S-300 in most cases eliminates the need for a SiC Intermediate Carrier, 
    saving money and improving process
·  The S-300 platform is unbreakable in the wafer fab environment and stronger than     
    SiC Intermediate Carrier
·  Operator loads or unloads up to 8 boats on to or from the S-300 platform
·  The S-300 platform home position can be set at any height position per ergonomic  
    specification
·  All mechanical functions are built with 3x design safety factor
·  The S-300 platform moves up or down to each cantilever level by a touch screen 
    controller and loads or unload all 300 wafers to and from the cantilever in one motion
·  The S-300 reduces operator caused wafer scrapes and particulates
·  The S-300 slides to the opposite end of the Loadstation or swings out for furnace 
    tube change and maintenance work
·  Quick and easy installation

AMTECH IBAL
Cassette to Cassette
Full Automation  


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·  Modular robot concept achieves maximum reliability
·  Zero footprint required
·  Retrofit kit available for 4”, 5”, 6”, 8” and 12” wafer
·  Mounts directly onto Loadstation
·  Loads individual process/baffle boats
·  Interfaces with factory automation
·  IBAL reduces operate caused wafer scrapes and particulates
·  IBAL boat loading cycle is faster than the speed of wafer Transfer Machine cycle
·  Simple Touch Screen
·  Controller managers auto loading and unloading between wafer Transfer Machine  
    and Cantileve Softlander or ATMOSCAN

ATMOSCAN® 


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The  ATMOSCAN® is a closed capsule furnace loading system whose might is in its performance and in the impact it creates on your bottom line. Greater throughput yield, higher die per wafer yield and lower cycle time makes ATMOSCAN® the standard of the industry.  

Wafer loads of 200 8" wafers (300 6" wafers) are achieved while jordan process results are maintained. ATMOSCAN® provides a level of uniformity three times tighter than competing schemes. Its tube within a tube design protects devices from particulates, and shortens cycle time by permitting a 900 degree C push/pull without warpage and crystal damage. The system excludes oxygen from the water environment, which makes it possible to control Qss and results in ultra-thin oxides with excellent uniformity. 

Contact Gilbert Technologies for more information about AMTECH products.