SEMILAB Semiconductor Physics Laboratory, Inc. was founded by a team of an academic research institute in 1989.  This group has developed the first commercialized deep level transient spectrometer and has top-level experience in semiconductor charactertization.  The creativity and the experience of the staff represents the main asset of the company.  Semilab’s R&D capacity enables manufacturing custom designed systems to meet the special requirements of its customers.

Semilab's products are state-of-the-art tools to characterize contamination and defects in semiconductor material throughout the wafer manufacturing and IC processes. Their high accuracy and sensitivity as well as their easy-to-use software make their application possible both for wafer and device manufacturers as well as for universities and research institutes.

Wafer Mapping Tools

For monitoring defects and contamination both in the bulk and the surface region of silicon.

WT-2000 WAFER TESTER Series

 

The new WT-2000 model allows combining several measurement techniques mentioned below in one system according to the customer's need. All tools are available up to 300 mm wafer size and provide full wafer mapping capability.
Measurement techniques:

·  m-PCD and Charge-PCD for bulk Si
·  EpiTest for epi
·  SPV for bulk Si
·  Kelvin Probe for oxide charge characterization

WT-85 MCT

Temperature dependent m-PCD lifetime measurement for Si and compound semiconductor materials.

SIRM-300 Bulk Microdefect Analyzer

for characterization of bulk microdefects (BMDs) such as oxygen and metal precipitations, stacking faults, dislocations, slip lines and voids.

DLS-83D Deep Level Spectrometer

for detection and identification of trace level of impurities in concentrations down to 109 atoms/cm3.

Resistivity Tester

A non-contact bulk resistivity measurement tool for rapid classification of silicon wafers, ingots and feedstock material.

P/N Tester

for non-contact conduction type determination of silicon wafers.

Corona Charge Generator

for charging up oxidized silicon wafers in an accurate and controlled way.

LBIC Tool

Light Beam Induced Current measurement (LBIC) for solar cell characterization.

Contact Gilbert Technologies for more information about SEMILAB products.