The Alcatel Micro Machining Systems (MMS) Product Group specializes in the designing, manufacturing, marketing, and servicing of deep plasma etching systems for the production of Micro Electro Mechanical systems (MEMS) and Micro Optical Electro Mechanical systems (MOEMS).

·  Both cryo and BOSCH room temperature processes
·  Invest in a single system and TRENCH ETCH SILICON and HIGH SPEED OXIDE 
   ETCH
·  Tele-maintenance modem and software
·  I-SPEEDER hardware for ultra high etch rates.  (Check these  etch rates.)  (Check 
   our standard 3kw supply and our 1800 l/m  standard pump.)
·  Forget about SOI notching.
·  Dazzling RIE lag control
·  Check our University and Research Systems.  Check our Manufacturing 
    Systems.
·  Check our footprints.
·  Check our ease of maintenance.
·  Alcatel is the Best of Breed. 

AMS 100 "I-SPEEDER"

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·  High etch rate technology ·  Designed for R&D Applications ·  Manual Vacuum Load Lock ·  100-200 mm wafer compatible ·  Mechanical or Electrostatic clamping ·  From 3 up to 16 gas lines ·  Windows™ Software ·  Broad substrate diversity     ·  Si, SiO2, III/V... ·  Small Footprint ·  Tele-maintenance modem