Neox 3D Optical Profiler
Sensofar is proud to announce the introduction of the new Neox. This represents a major breakthrough in non-contact Optical 3D profiling with a dual core 3D measuring microscope combined with confocal and interferometry capabilities. The combination of both techniques makes the neox a unique system that outperforms existing optical profilers. Neox is designed to obtain fast, non-invasive measurements of micro and nano-geometries surfaces in multiple configurations. The system with this dual technology sensor is flexible for R&D and quality inspections laboratories but sophisticated enough for customized solutions requiring online process controls.
Based on a patented micro-display technology enabling fast confocal scanning for up to 12.5 fps. using no moving parts, the compact, robust and modular design makes the Neox very well suited for OEM applications. Neox has the option to incorporate a spectroscopic reflectometer for the measurement of thin films. Film thickness can have a range of 10nm and a stack of up to 10 layers. With a measurement range of 0.1 nm to several nano meters, equipped with a dual vertical scanner based on a combination of a linear stage and a piezo scanner, the Neox provides the highest accuracy, linearity and repeatability in the market. The neoxs extremely high light efficiency illumination hardware and high contrast algorithm is ideal for measuring smooth surfaces with steep slopes of over 70:, rough and reflective surfaces and even samples containing dissimilar materials are suitable applications. The neox uses a black and white, high speed, high resolution CCD camera as the system metrological detector, and a color camera for bright field surface inspection that can be used to create impressive 3D views of the measurements.

Contact Gilbert Technologies for more information about Sensofar products.