CI-SEMI’s in-line, multi-channel wet process analysis system, WetSpec 200 enables non-contact real-time monitoring and closed-loop control of chemical composition in wet process applications. The WetSpec200 is ideal for monitoring, cleaning and etching chemistries. Based on CI-SEMI’s novel chemo-metric methodology, the WetSpec200 measures the absorption spectrum in the near infrared (NIR) fast and accurately without labor and waste involved. The system’s versatile SW models enable soft-switch between different chemistries. With the capability to monitor up to eight flow cells in parallel, the WetSpec200 provides an efficient, low cost per channel process monitoring. When integrated into a control system, the WetSpec200 enables tighter process control and identifies process excursions before they affect yield. 

Features and Benefits:

• In-line, real-time monitoring and characterization of chemical composition of liquids
• No need for chemical sampling or dilution
• Short measurement time and low operational costs
• One analyzer can monitor several measuring cells with different chemistries
• Analysis of complex (multi-component) chemistries
• Real-time measurement enables closed loop control
• Up to 200 meters distance between analyzer and measuring cell enables placement of analyzer in a convenient location