Sirius™ semiconductor diffusion furnaces

View larger image

  • PRO 150: 4-stack furnace system for wafers up to 150mm dia.

  • PRO 200: 3-stack furnace system for wafers up to 200mm dia.

  • PRO 300: 2-stack furnace system for wafers up to 300mm dia.
  • Compact—only 4.2 m² (45.9 ft²) in clean room
  • PC controls at each tube level for functional capability
  • Windows® based operating system for ease of use
  • Host computer with touch-screen controls
  • Available with atmospheric, LPCVD and PECVD processing capability
  • Film unformities on many processes comparable with vertical furnaces at less than 1/3 the cost
SolaReactor™
AR Film and POCl3 Deposition Systems





View larger image

Designed specifically for the solar industry, the SolaReactor™ deposits a dual refractive index PECVD AR film and low sheet resistance POCl3 deposition to produce highly efficient solar cells.

The SolaReactor™ provides increased yields and superior reflective value films, compared with atmospheric TiNitride process. The SolarReactor™ deposits a dual refractive index nitride film using an included process to produce one of the most efficient AR coatings available. The POCl3 configuration controls the sheet resistance to a high degree of accuracy.
  • Compact: floor space required is less than 4.2m² (45.9 ft²).
  • Each tube level PC-controlled for functional capability and ease of operation
  • Host computer with touch-screen and keyboard/mouse controls
  • POCl3 and PECVD processes available in the same system
  • Large bore — accommodates substrates up to 210mm diameter/diagonal
  • Processes either poly-crystalline or mono-crystalline substrates
  • Fully automatic insertion/retraction of preloaded substrate boats
  • Deposited/undeposited substrate boats exchanged in <10 seconds
  • Incorporates proven technologies developed over the last 40 years in the semiconductor and solar industries
Each SolarReactor™ system is capable of processing more than 15 MILLION finished POCI3 or over 7.7 MILLION finished PECVD substrates per year.

Saturn™ Direct Replacement
Furnace Heating Elements

 Available for all applications

ProTemp Saturn™ elements are available for all furnace makes, in sizes from 4-inch to 18-inch I.D. Elements are compatible with existing furnace electrics for easy installation.

Three series of elements are available

Standard elements are the element of choice for all applications that match original equipment elements

HiTemp™ high temperature elements are designed for operating temperatures to 1350°C

FasTemp™ elements employ light gauge heating wire to substantially reduce times to reach operating temperature and return to ambient. These elements are made for replacements in horizontal and vertical furnaces

Contact Gilbert Technologies for more information about ProTemp products.