Spinner System for Coating, Cleaning or Developing applications wafers up to 8 ( 200mm) and subtrates up to 6"x 6"(150x150mm)

Features:

  • Spinner System with RccT and automatic substrate pin lift

  • easy to clean multi part process chamber made of HP* material

  • Separate Electronic controller cabinet

  • Separate operator controller with colour touch display

  • Start, Stop and Vacuum on/of functions directly at the process module

  • Strong, direct drive brushless spinner motor

  • Turbulence free process area

  • No photoresFRT splash or dust on the cover plate, assur-ing a particle-free coating

  • Unit directly on the media arm mounted close to point of use to control dispense rate.

  • Programmable process parameters (motion and media)

  • Unlimited numbers of recipe (easy more expandable by USB Stick)

  • Standard up to 50 programmable recipe steps

  • Recipe step time: 0.1s -> 999sec (steps 0.1 sec)

  • USB and Ethernet interface for easy data storage and recipe transfer

  • Terminal for EMO external via Bench supply (integrated as option)

Contact Gilbert Technologies for more information about Solar-Semi products.